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Researcher's Profile

Professor

Satoru TAKAHASHI

Photon based Advanced Manufacturing Science

E-mail: takahashi.nanolab.t.u-tokyo.ac.jp

Office:

Tel: 03-5452-5187

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Biography

1995.03
Master of Engineering, Osaka University
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1996.04
Research Associate, Faculty of Engineering, Osaka University
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2002.10
Lecturer, School of Engineering, Osaka University
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2003.01
Associate Professor, School of Engineering, The University of Tokyo( UTokyo )
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2013.06
Professor, School of Engineering, UTokyo
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2014.04
Professor, RCAST, UTokyo

Research Interests

We conduct research on advanced micro/nano production technology, which can be applied to the next-generation ultra-precision manufacturing by focusing on photon energy, which is the ultimate energy believed to be the root of our life. Especially we are developing photon based cutting-edge techniques for micro/nano manufacturing science, such as laser-assisted nano-in-process measurement, laser-assisted nano-processing and structuring, and a novel concept about a future micro production system, cell-in-micro-factory, with which we can product innovative micro/nano functional devices supporting our future life. In order to realize our target, not only conventional light energy propagating in free-space but also localized light energy emerging at near-field region of bulk material is applied to our research from both a practical viewpoint as manufacturing techniques and a scientific viewpoint based on basic physics. Our research involves (a) proposal of new concept not only about elemental technology but also about a whole production system, (b) theoretical and experimental analyses unraveling its characteristics, and (c) experimental verification for practical realization.
Some of our ongoing projects are as follows:
(1) Nano-stereolithography using evanescent light energy.
(2) In-process super-resolution high-sensitive optical measurement for nano-defects in semiconductor industry.
(3) Laser direct fabrication of three-dimensional microstructures using photocatalyst nanoparticles.
(4) Study on cell-in-micro-factory based on active control of localized photon energy as a future micro production system.


Keywords

Laser-assisted nano-measurement, Laser-assisted nano-processing and structuring, Cell-in-micro-factory

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