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Researcher's Profile

Professor

Hiroshi TOSHIYOSHI

Micro Device Engineering

E-mail: hiro.iis.u-tokyo.ac.jp

Tel: 03-5452-6276

FAX: 03-5452-6648

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Biography

1996.03
PhD, School of Engineering, The University of Tokyo (UTokyo)
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1996.04
Lecturer, Institute of Industrial Science(IIS), UTokyo
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2002.04
Associate Professor, IIS, UTokyo
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2002.05
Associate Professor, VLSI Design & Education Center, UTokyo
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2005.04
Associate Professor, Center for International Research on Micro Mechatronics, IIS, UTokyo
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2009.07
Professor, RCAST, UTokyo

Research Interests

Research interests include the design and fabrication of MEMS(Micro Electro Mechanical Systems) technology based upon the semiconductor microfabrication processes to develop micronscale mechanical structures on silicon substrates for micro-optical applications, such as fiber-optic telecommunication(optical switchs, filters, attenuators) and laser projection-type image displays. As a microwave application, we also cover 10GHz range RF-MEMS switches and reconfigurable MEMS meta-material filters. To realize intelligent MEMS systems, we also develop integrated CMOS(Complementary Metal-Oxide Semiconductor) - MEMS technology, including the mixed-signal simulation and MEMS post-processing techniques. Besides the semiconductor-based MEMS, we recently developed a roll-toroll printing technology for large-area MEMS with potential applications such as flexible over-sized image displays.



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